XLH-25: Vacuum On/Off, Precision Control! Dedicated Vacuum Valves Empower High-Vacuum Environments
2025-10-13
In high-tech sectors such as semiconductor, photovoltaics, and vacuum coating, there are extreme requirements for establishing, maintaining, and switching vacuum environments. The XLH-25 vacuum valve is specifically designed for vacuum systems. Utilizing special materials and sealing technology, it ensures highly reliable on/off control of flow paths under vacuum conditions, serving as a key fundamental component for building high-vacuum (HV) and ultra-high-vacuum (UHV) systems.Core Product AdvantagesHigh-Vacuum Sealing PerformanceEmploys metal seals (e.g., oxygen-free copper) or special fluoroelastomer seals, offering extremely low leak rates (typically <1×10⁻¹⁰ Pa·m³/s), meeting the requirements of high-vacuum (HV) and even ultra-high-vacuum (UHV) applications.Low Outgassing MaterialsKey components like the valve body and stem are made from low-outgassing materials such as stainless steel, and undergo precision polishing or passivation treatments to minimize vacuum level interference caused by material outgassing.Fast-Actuation StructureFeatures optimized port and actuation design for quick opening and closing, enabling rapid vacuum establishment or isolation, thereby improving equipment cycle time and efficiency.Multiple Actuation MethodsOffers manual, pneumatic, and electric actuation options (specific type depends on model suffix), adaptable to automated control needs.Standard Flange ConnectionsUtilizes standard vacuum flange interfaces like CF (ConFlat) or KF (ISO), facilitating system integration and ensuring connection sealing and interchangeability.Typical Application ScenariosSemiconductor Equipment: Pumping down and isolating process chambers for etching, PVD, CVD, etc.Vacuum Coating Equipment: Controlling the connection between the coating chamber and the pumping system.Research & Experimental setups: On/Off control for vacuum lines in particle accelerators, surface analyzers, etc.Solar Cell Manufacturing: Controlling the vacuum environment in equipment such as PECVD.Technical Parameters (Typical)Port Size/Type: DN25 ISO-KF or similar standard vacuum flange (25 may indicate nominal diameter)Leak Rate: <1×10⁻¹⁰ Pa·m³/sOperating Pressure Range: Atmosphere to High Vacuum (e.g., 10⁵ Pa to 10⁻⁶ Pa or higher)Body Material: 304/316 Stainless SteelSeal Material: Fluoroelastomer (FKM) / Metal Seal (Oxygen-Free Copper)SummaryThe XLH-25 vacuum valve acts as the ”Sealing Guardian” of vacuum systems. Its core value lies in providing a reliable, tight, and controllable passage switch for high-cleanliness, demanding vacuum environments, forming the foundation for ensuring vacuum process quality and equipment performance.Choosing the XLH-25 means equipping your vacuum system with a reliable, stringent “valve gate,” ensuring the purity and stability of the vacuum environment!
XLH-40 |
XLH-25-XF1A |
XLH-40-XA |
XLH-16-XA |
XLH-50 |
XLH-25-XN1A |
XLH16-30-1 |
XLH-40 |
XLH-16 |
XLH-25-XQ1B |
XLH-25 |
XLH-16 |