Festo VEFC Mass Flow Controller: Compact Piezo Valve for Precise Inert Gas Flow Control up to 200 l/min

The mass flow controller VEFC from Festo is one of the most compact on the market, while capable of a flow rate of 200 l/min. Thanks to digitalization, the flow rate remains constant. This means that this dynamic, directly controlled piezo valve for inert gases doesn’t have to be adjusted manually. It only takes milliseconds to precisely adjust the flow rates and their settings, and they remain tamper-proof. This provides users with the flexibility they need for their production processes.

In addition, the VEFC allows continuous monitoring of processes since the flow rate and output pressure are always transparent.

Reliable Protection of Wafers in Semiconductor Manufacturing

Reliably controlling the flow of inert gases such as nitrogen is particularly important in the semiconductor industry in order to avoid damaging wafers. By focusing on inert gases without media separation, the VEFC proves to be a favourable alternative to other solutions on the market when controlling nitrogen in load ports or EFEMs (Equipment Front End Modules).

Economical, Reliable, and Precise N₂ Purging

Different flow rates can be controlled in the individual purge steps by deploying the VEFC in the load port:

• Pre-blowing: Rapid initial establishment of the inert gas atmosphere
• Pre-purge: Gradual reduction of oxygen and humidity levels
• Process purge: Maintaining stable process conditions
• Post-purge: Final protection after process completion

The VEFC ensures that only the absolutely necessary amount of nitrogen is used in each step. Users thus save nitrogen and shorten the processing time until the dry shielding gas atmosphere has been reached.

Application Industries

• Electronics / Semiconductor: Inert gas atmosphere protection during wafer processing
• Food production: Protective gas filling in packaging
• Machine building: Shielding gas for welding, heat treatment and other processes

Key Advantages at a Glance

• One of the most compact mass flow controllers on the market
• Up to 200 l/min, direct piezo control with millisecond response
• Tamper-proof flow settings ideal for strict process control requirements
• Real-time transparent monitoring of flow rate and pressure
• Significant nitrogen savings
• No media separation required — focused on inert gases for cost advantage

The Festo VEFC mass flow controller is now available through Festo’s global sales network. Contact our technical engineers for detailed specifications or application evaluation support.