SMC VQZ115R-5MO1-CP-Q — VQZ100 Series External Pilot 0.35W 3-Port Solenoid Valve, 10mm Width
2026-06-05The SMC VQZ115R-5MO1-CP-Q is a 3-port / 2-position normally-closed (N.C.) external pilot solenoid valve from the VQZ100 series, featuring base-mount installation with a valve body width of just 10 mm. The external pilot design enables reliable operation in vacuum systems down to -100 kPa. With ultra-low power consumption of 0.35 W and IP65 protection rating, this valve is widely used in compact automation equipment for electronics manufacturing, semiconductor packaging, vacuum pick-and-place, and precision pneumatic control.
Product Specifications
| Parameter | Value |
|---|---|
| Manufacturer | SMC |
| Series | VQZ100 (10 mm valve width) |
| Model | VQZ115R-5MO1-CP-Q |
| Valve Type | 3-Port / 2-Position, Normally Closed (N.C.) |
| Actuation | Pilot Operated |
| Pilot Type | External Pilot — suitable for vacuum |
| Mounting | Base Mounted (Sub-plate) |
| Port Size | M5 × 0.8 |
| Rated Voltage | 24 VDC |
| Electrical Entry | M-type Plug Connector (connector not included) |
| Power Consumption | 0.35 W (standard) / 0.4 W (with indicator light) |
| Operating Pressure | 0.1 ~ 0.7 MPa |
| Pilot Pressure Range | 0.1 ~ 0.7 MPa (independent supply) |
| Cv Value | 0.17 |
| Response Time | ≤ 15 ms (rubber seal) / ≤ 14 ms (metal seal) |
| Max. Operating Frequency | 20 Hz |
| Seal Type | Metal seal or NBR rubber seal |
| Fluid Temperature | -10°C to +50°C (no freezing) |
| Manual Override | Non-locking push type |
| Lubrication | Not required (lubrication-free) |
| Enclosure | IP65 (with DIN terminal connector) |
| Weight | Approx. 24 g (valve body, excluding sub-plate) |
| Certification | CE Marked (-Q suffix) |
Model Number Breakdown
- VQZ: VQZ series base-mounted solenoid valve
- 1: Body size 10 mm width (100 series)
- 15: 3-port, single unit, 2-position configuration
- R: External pilot type (suitable for vacuum)
- 5: Rated voltage 24 VDC
- MO: M-type plug connector (without connector)
- 1: Non-locking push-type manual override
- CP: Clean Port variant
- Q: CE marking compliance
Key Features and Benefits
External Pilot Design — Full Vacuum Compatibility
The VQZ115R-5MO1-CP-Q uses an external pilot architecture where pilot pressure is supplied independently from the main valve circuit. This enables stable operation across a wide range from -100 kPa vacuum to +0.7 MPa, making it ideal for vacuum pick-and-place systems such as wafer handling and electronic component placement, where standard internal pilot valves fail to switch under negative pressure conditions.
Ultra-Slim Profile: Only 10 mm Width
At just 10 mm wide, the valve body enables high-density mounting in the tightest spaces. Combined with VV3QZ12/VV3QZ15 integrated manifolds or DIN rail mounting, compact multi-valve control stations can be built, dramatically reducing control cabinet footprint.
Ultra-Low 0.35 W Power — Direct PLC Drive
Standard power consumption of just 0.35 W enables direct actuation by PLC transistor outputs without interposing relays. An optional indicator light version (0.4 W) provides LED status indication and built-in surge voltage suppression.
High-Speed Response and High-Frequency Operation
Response time of ≤ 15 ms (rubber seal) or ≤ 14 ms (metal seal), with a maximum operating frequency of 20 Hz, meets the demands of high-duty-cycle applications such as high-speed sorting and jet valve control. The metal seal variant offers superior durability and faster response.
IP65 Protection — Industrial-Grade Reliability
When used with a DIN terminal connector, the valve achieves IP65 rating for dust-tight and water-jet-resistant operation, ensuring reliable performance in wet and dusty industrial environments. The aluminium alloy body balances lightweight construction with mechanical strength.
Applications
- Vacuum Pick-and-Place: wafer handling, electronic component placement, vacuum packaging
- Electronics Manufacturing: PCB assembly, chip sorting, dispensing equipment pneumatic control
- Semiconductor Packaging: wire bonding machines, wafer probe stations, CMP polishing equipment
- Medical Devices: in-vitro diagnostic analysers, microfluidic pneumatic circuit switching
- High-Speed Sorting and Rejection: defective product blow-off, material diverting, jet marking
- Automated Assembly: compact manifold-mounted valve banks, single-acting cylinder actuation
Manifold Compatibility
| Manifold Model | Description |
|---|---|
| VV3QZ12 | M5 ports, 2–20 station D-sub manifold |
| VV3QZ15 | Rc1/8 ports, 2–20 station D-sub manifold |
| VV3QZ22 | Mixed type, supports VQZ100/200/300 series mixing |
Related Models
| Model | Description |
|---|---|
| VQZ115-5MO1 | Standard internal pilot, same dimensions |
| VQZ115R-5MOZ1 | With DIN terminal connector, IP65 |
| VQZ215R-5MO1 | VQZ200 series, 5-port, 15 mm width |
| VQZ315R-5MO1 | VQZ300 series, 5-port, 18 mm width |
| SYJ314R-5G-M5 | SYJ300 external pilot, 3-port alternative |
FAQ
Q: What is the difference between VQZ115R-5MO1-CP-Q and the standard VQZ115?
The R suffix designates external pilot operation, where pilot pressure is supplied through a dedicated independent port. This allows the valve to switch reliably even when the main circuit is under vacuum (down to -100 kPa). The standard VQZ115 uses internal pilot and is limited to positive-pressure circuits only.
Q: Does the MO electrical entry require a separate connector purchase?
Yes. The MO designation indicates an M-type plug interface on the valve body without the mating connector included. Users must purchase a compatible DIN terminal connector or lead wire assembly separately. For a version with the connector included, choose the MOZ suffix variant (e.g. VQZ115R-5MOZ1).
Q: What advantages does this model offer over the SYJ300 series?
The VQZ100 series has a valve width of just 10 mm (compared to 28 mm for SYJ300), making it far better suited for extremely space-constrained, high-density installations. Additionally, the VQZ series supports metal seal options with a higher maximum frequency (20 Hz vs. 10 Hz for SYJ300), suitable for faster switching applications.
In stock and available for bulk orders. Contact us for a quotation or technical consultation.